Automatic Recommendation of Patch Regions for Wafer Wobbling Detection in Semiconductor Manufacturing

Authors: Kangsan Seo, Sungjin Hong, Junjun Zhang, Giseop Noh

Publisher: The International Journal of Advanced Smart Convergence

Type: Int. Journal

Indexed: KCI

Volume / Number: 14 / 4

Pages: 178 - 174

Date: 2025-12-31

URL: https://www.kci.go.kr/kciportal/ci/sereArticleSearch/ciSereArtiView.kci?sereArticleSearchBean.artiId=ART003288618

DOI: